TEAl SSG

Product Line High purity metalorganics

TEAl SSG is an aluminum precursor for atomic layer deposition (ALD) processes.

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TEAl SSG (High purity metalorganics)

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TEAl SSG (High purity metalorganics)

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  • ProductChemicalFamily

    High Purity Metalorganics

  • ProductCASnr

    97-93-8

  • ProductPhysicalForm

    Liquid

  • Regional availability

    Africa, Asia, Asia Pacific, China, Europe, Global, India, Latin America, Middle East, North America, Oceania

  • ProductMolecularWeight

    114.2

  • ProductChemicalsName

    Triethylaluminum

  • Molecular drawing

    High Purity Metalorganics

  • ProductApplications

    TEAl SSG is used as a high quality aluminum precursor for atomic layer deposition (ALD) processes in the silicon semiconductor industry. Containers are fabricated from stainless steel with an electropolished internal finish and are equipped with dip tube for top discharge and diaphragm valves. The diaphragm valves are equipped with metal gasket face seal connections.

Downloads

Product Data Sheets

PDS TEAl SSG - Electronics - Global (English)

  • Product Data Sheet | application/pdf (50 KB) | English

Other Documents

Brochure High Purity Metalorganics (HPMO)

  • Brochure | application/pdf (175,7 KB) | English

Use Cases

Electronics

MsbLongDescription

TEAl SSG is an aluminum precursor (Select Semiconductor Grade) for deposition technologies used in the silicon semiconductors industry.

ProductFunctions

  • Precursor

MsbApplications

  • Electronic Devices
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For more information about TEAl SSG, please contact our technical experts. We look forward to hearing from you.

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