TEAl SSG

Product Line High purity metalorganics

TEAl SSG is an aluminum precursor for atomic layer deposition (ALD) processes.

  • Chemical family

    High Purity Metalorganics

  • CAS number

    97-93-8

  • Physical form

    Liquid

  • Regional availability

    Africa, Asia, Asia Pacific, China, Europe, Global, India, Latin America, Middle East, North America, Oceania

  • Molecular Weight

    114.2

  • Chemical name

    Triethylaluminum

  • Molecular drawing

    High Purity Metalorganics

  • Applications

    TEAl SSG is used as a high quality aluminum precursor for atomic layer deposition (ALD) processes in the silicon semiconductor industry. Containers are fabricated from stainless steel with an electropolished internal finish and are equipped with dip tube for top discharge and diaphragm valves. The diaphragm valves are equipped with metal gasket face seal connections.

Downloads

Product Data Sheets

PDS TEAl SSG - Electronics - Global (English)

  • Product Data Sheet | application/pdf (50 KB) | English

Other Documents

Brochure High Purity Metalorganics (HPMO)

  • Brochure | application/pdf (175.7 KB) | English

Market Segments

Electronics

Detailed description

TEAl SSG is an aluminum precursor (Select Semiconductor Grade) for deposition technologies used in the silicon semiconductors industry.

Functions

  • Precursor

Applications

  • Electronic Devices
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