TEAl SSG

High purity metalorganics

High Purity Metalorganics

TEAl SSG is an aluminum precursor for atomic layer deposition (ALD) processes.

  • Product name

    TEAl SSG
  • Chemical family

    High Purity Metalorganics
  • CAS number

    97-93-8
  • Physical form

    Liquid
  • Regional availability

    Africa, Asia, Asia Pacific, China, Europe, Global, India, Latin America, Middle East, North America, Oceania
  • Chemical name

    Triethylaluminum
  • Molecular Weight

    114.2
  • Applications

    TEAl SSG is used as a high quality aluminum precursor for atomic layer deposition (ALD) processes in the silicon semiconductor industry. Containers are fabricated from stainless steel with an electropolished internal finish and are equipped with dip tube for top discharge and diaphragm valves. The diaphragm valves are equipped with metal gasket face seal connections.

Market Segments

Electronics

Detailed description

TEAl SSG is an aluminum precursor (Select Semiconductor Grade) for deposition technologies used in the silicon semiconductors industry.

Functions

  • Precursor

Applications

  • Electronic Devices

Downloads

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