TEAl SSG
Product Line High purity metalorganics
TEAl SSG is an aluminum precursor for atomic layer deposition (ALD) processes.
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Chemical family
High Purity Metalorganics -
CAS number
97-93-8 -
Physical form
Liquid -
Regional availability
Africa, Asia, Asia Pacific, China, Europe, Global, India, Latin America, Middle East, North America, Oceania -
Molecular Weight
114.2 -
Chemical name
Triethylaluminum
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Molecular drawing
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Applications
TEAl SSG is used as a high quality aluminum precursor for atomic layer deposition (ALD) processes in the silicon semiconductor industry. Containers are fabricated from stainless steel with an electropolished internal finish and are equipped with dip tube for top discharge and diaphragm valves. The diaphragm valves are equipped with metal gasket face seal connections.
Downloads
Other Documents
Brochure High Purity Metalorganics (HPMO)
- Brochure | application/pdf (175.7 KB) | English