High purity metalorganics
TEGa SSG is a gallium precursor for the deposition of compound semiconductors.
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Product name
TEGa SSG -
Chemical family
High Purity Metalorganics -
CAS number
1115-99-7 -
Physical form
Liquid -
Chemical name
Triethylgallium -
Molecular Weight
156.9 -
Applications
TEGa SSG is used as a gallium precursor for the deposition of compound semiconductors which are used in applications such laser diodes, sensors (VCSEL), light emitting diodes (LED) and concentrated photovoltaic cells (CPV). TEGa is mainly used in processes with lower deposition temperatures. The triethylgallium is supplied in cylinders made from stainless steel with an electropolished internal finish. The cylinders are equipped with dip tube and diaphragm valves. The diaphragm valves are equipped with metal gasket VCR-connections.
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