Product Line High purity metalorganics

TMAl LO is an aluminum precursor for the deposition of compound semiconductors, especially synthesized to meet ultra low-oxygen requirements.

  • Chemical family

    High Purity Metalorganics
  • CAS number

  • Physical form

  • Molecular Weight

  • Chemical name

  • Molecular drawing

    High Purity Metalorganics
  • Applications

    For very oxygen sensitive applications, we have a unique grade to meet your demanding applications. Our special grade TMAL LO has an oxygen specification below 1 ppm oxygen. TMAL LO is the preferred grade by many customers for applications such as laser diodes, sensors (VCSEL), concentrated photovoltaic cells (CPV), power semiconductor devices (GaN on Si) and phosphide LED. Our trimethylaluminum is supplied in canisters (cylinders) made from stainless steel with an electropolished internal finish. The cylinders are equipped with manual or pneumatic diaphragm valves. The valves are equipped with metal gasket VCR-connections.

Market Segments


Detailed description

TMAl LO is an unique grade to meet demanding applications, with an oxygen specification below 1 ppm oxygen.


  • Precursor


  • Electronic Devices
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For more information about TMAl LO, please contact our technical experts. We look forward to hearing from you.

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